Displacement of micropositioning table combined with michelson interferometer 用迈克尔逊干涉仪测微定位工作台的位移
A conclusion about the relationship between circuit parameter of driver and performance of pizeo actuator had been given through the experiment result 实验结果同时指明了驱动器中直接影响压电陶瓷微定位性能的关键电路参数。
After the characteristic of piczoelectric ceramic ( pzt ) was analyzed , pzt micro - positioning system was modeling and logical controller rule were used in this control system 摘要在分析压电陶瓷特性基础上,建立了压电陶瓷微定位系统的模型,并将逻辑规则控制器应用于其控制系统中。
Quadrants sensor based on silicon are now widely used in many fields , such as laser collimation , homing , tracking and searching devices , precision measurement et al 基于硅光电传感的象限传感器广泛应用于激光的瞄准、制导、跟踪,搜索装置,精密测量,如激光微定位、位移监控、精密机床的光电控制等领域。
All the evidences point that the new embed control system of pizeo actuator gets excellent performance . it can be used in both quick and stable positioning area . still the embed control system contributes a lot for the research of smaller nano - positioning system based on pizeoceramic in the future 本文研制的压电陶瓷嵌入式控制系统适用于静态稳定、动态高速定位等不同应用场合,为进一步研制小型化、集成化、通用化的压电陶瓷微定位系统提供了理论和实践经验。
To reduce the scale of system a embed controller had been introduced to replace the traditional computer system which takes weaker noise , smaller scale and power consume . the integrate controller fulfills whole function of computer without multi machine cooperating . melting the designed driver and controller , a integrate pizeo control system funded 并结合设计的驱动器建立了完整的压电陶瓷微定位控制系统,使用新型架构的嵌入式控制器依据传统计算机结构模块化设计,其在保证满足原有系统功能需求的前提下提供了小体积、低功耗、弱干扰等新特性,为基于压电陶瓷的设备小型化、便携化设计奠定了基础。