Study on the self - diffusion coefficient for the long ch 高压下长链分子的自扩散系数研究
Research interest : surface science ; kikuchi electron holography ; electron multiple - scattering techinques ; molecular dynamical simulations ; ab initio total energy calculations ; self - diffusion on metal surfaces ; dissociative adsorption of h2 on metal surfaces 研究兴趣:表面科学,电子全像术,电子多重散射分析理论技术,分子动力学模拟,第一原则总能量计算,表面原子动态学,氢分子的解离吸附。
At same time macroscopical and microcosmic mathematical model of nitridation are investigated . in this paper the thermodynamics of direct - nitridation , effect of temperature and nitrogen ambience on nitridaton and self - diffusion are discussed in the theory of physical chemistry in detail 同时本文用物理化学的原理讨论了硅片氮气直接氮化的热力学方程、氮化条件的理论根据和原子的自扩散,从理论上证明随温度升高氮化加剧,气氛纯度越高氮化越容易的结论。