All these has provided us with scientific basis for designing the chamber of icp etching system and selecting the appropriate etching samples 这些结论为设计icp刻蚀系统的反应室、选择合适的刻蚀工艺提供了科学的根据。
It is not possible to have the old and new versions of zope plone installed together on an etch system , partly because the old packages depend on 不可能在etch系统上同时将旧版和新版的zope plone安装在一起,部份原因是因为旧版的套件相依于
Please note that the new mechanism means that if you e . g . exchange ethernet adapters in a running etch system , the new adapter will also get a new interface name 请注意到,新的机制也代表了如果您像是置换了正在运作中的etch系统上的网路卡,新的网路卡将会拿到一个新的介面名称。
A set of icp etching system has been designed and manufactured through the analysis of the probe diagnosed results . during the study of the system , the emphasis is laid on the matching problem of icp coupled antenna via the rf matching device and rf power source 通过对探针诊断结果的分析,设计并制作一套icp刻蚀系统,重点研究icp耦合天线通过射频匹配器与射频功率源的匹配问题,得到很好的匹配效果,在射频输出功率为500w以内时,反射功率小于10w 。
When the output power of the rf is within 500w and the reflection power is within 10w , a good matching effect can be gained . insb - in material in the icp etching system is etched by chc1f2 plasma . through the sem analysis of the etching result , it can be observed that the sidewall is smooth , flat and anisotropic 在自制的icp干法刻蚀系统中用chclf _ 2等离子体对insb - in材料实现了干法刻蚀,通过对刻蚀样品的sem分析,观察到刻蚀后的侧壁光滑平整,有良好的各向异性。