Process parameters related to the film quality are discussed ; relations are found between the etching rate and different process parameters when sio2 and cr thin films are etched in an inductively coupled plaslma ( icp ) etching equipment ; the tmah eroding solution ’ s ph value under different temperatures and concentrations are studied , since the etching process can be controlled by the ph value 3 .初步研究了利用pecvd淀积si3n4薄膜的工艺,讨论了影响薄膜质量的相关工艺参数;初步研究了用icp刻蚀sio2和cr的相关工艺;通过分析不同浓度tmah腐蚀液在不同温度下其ph值的变化,研究了以溶液ph值作为腐蚀溶液的控制参数。
In order to make integration of theory with practice , a lot of experiments have been done . mask - making technology , photoetching and wet - etching processes have been optimized . the author also presents the application and commercial value of silicon v - groove arrays 在实践上,对制作工艺积极探索,提出新的制备硅掩蔽膜的工艺方案,对影响光刻质量的因素深入分析,试验摸索出适用于v型槽的各向异性湿法腐蚀的腐蚀液配方,独立优化设计了制作硅v型槽的相关工艺,制作出高质量的硅v型槽。
The stronger combination of fiber and matrix after plasma treatment was discovered . the mechanism of reinforcement of interface combination with plasma treatment was developed as follows : by means of plasma treatment , the wettability of fiber ' s surface was increased , specific area of fiber was enhanced owing to the etching process , the meshing engagement between fiber and matrix was enhanced . with the same parameter ( power , vacuum degree , processing gas ) , the optimum time of plasma treatment is 1 2 minutes 证明了纤维的等离子体处理对纤维与基体的界面结合的提高作用;分析了纤维的等离子体处理增强界面结合的作用机理:一为提高了纤维表面的浸润性;二为对纤维表面的刻蚀作用,增加了纤维的比表面积,同时增强了纤维与基体界面间的机械啮合作用;并得出了在相同处理参数(功率、真空度和工作气体)下等离子体处理的最佳时间为1 2分钟。